Parylene MEMS

The members of the Parylene MEMS group include Zhang Meixuan (Ph.D. candidate), Xu Han (Ph.D. candidate) and Chen Lang (Ph.D.student).

Research topics includes:

Parylene MEMS process development and performance research.

Development of various types of Parylene deposition processes, including Parylene C, Parylene N, Parylene F and Parylene AF4

Adhesion enhancement of Parylene based on nanoforest structure

Research on ultra-thin Parylene deposition method, which can achieve high-precision Parylene deposition as low as 10nm

Various types of Parylene film performance test and parameter library

Parylene MEMS Applications

Microstructure based on Parylene MEMS fine processing for thermal insulation of chips

Preparation of low-permeability micro-nano channels based on PcPDMS

Parylene Biofluorescence Labeling Based on Parylene C Autofluorescence

Fast Trace Cell Capture Based on Parylene C Micropore Array Filters

High-density and high-performance silicon-based flexible electronics based on Parylene MEMS