The members of the Parylene MEMS group include Zhang Meixuan (Ph.D. candidate), Xu Han (Ph.D. candidate) and Chen Lang (Ph.D.student).
Research topics includes:
Parylene MEMS process development and performance research.
Development of various types of Parylene deposition processes, including Parylene C, Parylene N, Parylene F and Parylene AF4
Adhesion enhancement of Parylene based on nanoforest structure
Research on ultra-thin Parylene deposition method, which can achieve high-precision Parylene deposition as low as 10nm
Various types of Parylene film performance test and parameter library
Parylene MEMS Applications
Microstructure based on Parylene MEMS fine processing for thermal insulation of chips
Preparation of low-permeability micro-nano channels based on PcPDMS
Parylene Biofluorescence Labeling Based on Parylene C Autofluorescence
Fast Trace Cell Capture Based on Parylene C Micropore Array Filters
High-density and high-performance silicon-based flexible electronics based on Parylene MEMS